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Micro and Nano Fabrication

Author: Hans H. Gatzen
Publisher: Springer
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.


Micro and Nanomanufacturing

Author: Mark J. Jackson
Publisher: Springer Science & Business Media
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Size: 21,94 MB
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This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.


Electrochemical Micromachining for Nanofabrication MEMS and Nanotechnology

Author: Bijoy Bhattacharyya
Publisher: William Andrew
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)


Microfabrication and Nanomanufacturing

Author: Mark J. Jackson
Publisher: CRC Press
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Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.


Biosensors Based on Nanomaterials and Nanodevices

Author: Jun Li
Publisher: CRC Press
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Biosensors Based on Nanomaterials and Nanodevices links interdisciplinary research from leading experts to provide graduate students, academics, researchers, and industry professionals alike with a comprehensive source for key advancements and future trends in nanostructured biosensor development. It describes the concepts, principles, materials, device fabrications, functions, system integrations, and applications of various types of biosensors based on signal transduction mechanisms, including fluorescence, photonic crystal, surface-enhanced Raman scattering, electrochemistry, electro-luminescence, field-effect transistor, and magnetic effect. The book: Explains how to utilize the unique properties of nanomaterials to construct nanostructured biosensors to achieve enhanced performance Features examples of biosensors based on both typical and emerging nanomaterials, such as gold nanoparticles, quantum dots, graphene, graphene oxides, magnetic nanoparticles, carbon nanotubes, inorganic nanowires/nanorods, plasmonic nanostructures, and photonic crystals Demonstrates the broad applications of nanostructured biosensors in environmental monitoring, food safety, industrial quality assurance, and in vitro and in vivo health diagnosis Inspires new ideas for tackling multiscale and multidisciplinary issues in developing high-performance biosensors for complex practical biomedical problems Focusing on the connection between nanomaterials research and biosensor development, Biosensors Based on Nanomaterials and Nanodevices illustrates the exciting possibilities and critical challenges of biosensors based on nanomaterials and nanodevices for future health monitoring, disease diagnosis, therapeutic treatments, and beyond.


Introduction to Microfabrication

Author: Sami Franssila
Publisher: John Wiley & Sons
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Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than device physics * In-depth discussion on process integration showing how processes, materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.


Micro and Nano Fabrication Technology

Author: Jiwang Yan
Publisher: Springer
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Size: 21,62 MB
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This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.


Stem Cell Biology and Tissue Engineering in Dental Sciences

Author: Ajaykumar Vishwakarma
Publisher: Academic Press
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Stem Cell Biology and Tissue Engineering in Dental Sciences bridges the gap left by many tissue engineering and stem cell biology titles to highlight the significance of translational research in this field in the medical sciences. It compiles basic developmental biology with keen focus on cell and matrix biology, stem cells with relevance to tissue engineering biomaterials including nanotechnology and current applications in various disciplines of dental sciences; viz., periodontology, endodontics, oral & craniofacial surgery, dental implantology, orthodontics & dentofacial orthopedics, organ engineering and transplant medicine. In addition, it covers research ethics, laws and industrial pitfalls that are of particular importance for the future production of tissue constructs. Tissue Engineering is an interdisciplinary field of biomedical research, which combines life, engineering and materials sciences, to progress the maintenance, repair and replacement of diseased and damaged tissues. This ever-emerging area of research applies an understanding of normal tissue physiology to develop novel biomaterial, acellular and cell-based technologies for clinical and non-clinical applications. As evident in numerous medical disciplines, tissue engineering strategies are now being increasingly developed and evaluated as potential routine therapies for oral and craniofacial tissue repair and regeneration. Diligently covers all the aspects related to stem cell biology and tissue engineering in dental sciences: basic science, research, clinical application and commercialization Provides detailed descriptions of new, modern technologies, fabrication techniques employed in the fields of stem cells, biomaterials and tissue engineering research including details of latest advances in nanotechnology Includes a description of stem cell biology with details focused on oral and craniofacial stem cells and their potential research application throughout medicine Print book is available and black and white, and the ebook is in full color


Micro and Nano Techniques for the Handling of Biological Samples

Author: Jaime Castillo-León
Publisher: CRC Press
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Several micro- and nanomanipulation techniques have emerged in recent decades thanks to advances in micro- and nanofabrication. For instance, the atomic force microscope (AFM) uses a nano-sized tip to image, push, pull, cut, and indent biological material in air, liquid, or vacuum. Using micro- and nanofabrication techniques, scientists can make manipulation tools, such as microgrippers and nanotweezers, on the same length scale as the biological samples. Micro and Nano Techniques for the Handling of Biological Samples reviews the different techniques available to manipulate and integrate biological materials in a controlled manner, either by sliding them along a surface (2-D manipulation), or by gripping and moving them to a new position (3-D manipulation). The advantages and drawbacks are mentioned together with examples that reflect the state-of-the-art in manipulation techniques for biological samples. Thanks to the advances in micro- and nanomanipulation techniques, the integration of biomaterials with physical transducers has been possible, giving rise to new and highly sensitive biosensing devices. Although great progress has been made, challenges are still present. To understand the complex interactions between and inside biological samples, scientists will always be working on improving technologies to manipulate, transport, sort, and integrate samples in different environments. Balanced between simplicity for the beginner and hardcore theory for the more advanced readers, this book is the ideal launching point for sharpening the scientific tools required to address these challenges.


Manufacturing Techniques for Microfabrication and Nanotechnology

Author: Marc J. Madou
Publisher: CRC Press
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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.